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Robust autofocusing for scanning electron microscopy based on a dual deep learning network

Scanning electron microscopy (SEM) is a high-resolution imaging technique with subnanometer spatial resolution that is widely used in materials science, basic science, and nanofabrication. However, conducting SEM is rather complex due to the nature of using an electron beam and the many parameters t...

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Detalles Bibliográficos
Autores principales:	Lee, Woojin, Nam, Hyeong Soo, Kim, Young Gon, Kim, Yong Ju, Lee, Jun Hee, Yoo, Hongki
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8536763/ https://www.ncbi.nlm.nih.gov/pubmed/34686722 http://dx.doi.org/10.1038/s41598-021-00412-5

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