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Surface Morphology and Microstructure Evolution of Single Crystal Diamond during Different Homoepitaxial Growth Stages

Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillo...

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Detalles Bibliográficos
Autores principales:	Shao, Guoqing, Wang, Juan, Zhang, Shumiao, Wang, Yanfeng, Wang, Wei, Wang, Hong-Xing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537231/ https://www.ncbi.nlm.nih.gov/pubmed/34683554 http://dx.doi.org/10.3390/ma14205964

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