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Review of Recent Development of MEMS Speakers

Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing ex...

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Detalles Bibliográficos
Autores principales: Wang, Haoran, Ma, Yifei, Zheng, Qincheng, Cao, Ke, Lu, Yao, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537663/
https://www.ncbi.nlm.nih.gov/pubmed/34683308
http://dx.doi.org/10.3390/mi12101257

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