Fabrication of a Chalcogenide Glass Microlens Array for Infrared Laser Beam Homogenization

Infrared (IR) microlens arrays (MLA) have attracted increasing interest for use in infrared micro-optical devices and systems. However, the beam homogenization of IR laser light is relatively difficult to achieve because most materials absorb strongly in the IR wavelength band. In this paper, we present a new method for the application of double-sided quasi-periodic chalcogenide glass (ChG) MLAs to infrared laser homogenization systems. These are non-regular arrays of closely spaced MLAs. The double-sided MLAs were successfully prepared on the ChG surface using a single-pulse femtosecond laser-assisted chemical etching technique and a precision glass molding technique. More than two million close-packed microlenses on the ChG surface were successfully fabricated within 200 min. By taking advantage of ChG’s good optical performance and transmittance (60%) in the infrared wavelength band (1~11 μm), the homogenization of the IR beam was successfully achieved using the ChG quasi-periodic MLA.