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Integration Technology for Wafer-Level LiNbO(3) Single-Crystal Thin Film on Silicon by Polyimide Adhesive Bonding and Chemical Mechanical Polishing
An integration technology for wafer-level LiNbO(3) single-crystal thin film on Si has been achieved. The optimized spin-coating speed of PI (polyimide) adhesive is 3500 rad/min. According to Fourier infrared analysis of the chemical state of the film baked under different conditions, a high-quality...
Autores principales: | Geng, Wenping, Yang, Xiangyu, Xue, Gang, Xu, Wenhao, Bi, Kaixi, Mei, Linyu, Zhang, Le, Hou, Xiaojuan, Chou, Xiujian |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537918/ https://www.ncbi.nlm.nih.gov/pubmed/34685009 http://dx.doi.org/10.3390/nano11102554 |
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