Batch Transfer Printing of Small-Size Silicon Nano-Films with Flat Stamp

Silicon nano-film is essential for the rapidly developing fields of nanoscience and flexible electronics, due to its compatibility with the CMOS process. Viscoelastic PDMS material can adhere to Si, SiO(2), and other materials via intermolecular force and play a key role in flexible electronic devic...

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Detalles Bibliográficos
Autores principales: Cao, Wenping, Liu, Guochang, Miao, Jinwei, Zhang, Guojun, Cui, Jiangong, Yang, Yuhua, He, Changde, Zhang, Wendong, Wang, Renxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8538986/
https://www.ncbi.nlm.nih.gov/pubmed/34683306
http://dx.doi.org/10.3390/mi12101255

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