Batch Transfer Printing of Small-Size Silicon Nano-Films with Flat Stamp

Silicon nano-film is essential for the rapidly developing fields of nanoscience and flexible electronics, due to its compatibility with the CMOS process. Viscoelastic PDMS material can adhere to Si, SiO(2), and other materials via intermolecular force and play a key role in flexible electronic devic...

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Bibliografiska uppgifter
Huvudupphovsmän: Cao, Wenping, Liu, Guochang, Miao, Jinwei, Zhang, Guojun, Cui, Jiangong, Yang, Yuhua, He, Changde, Zhang, Wendong, Wang, Renxin
Materialtyp: Online Artikel Text
Språk:English
Publicerad: MDPI 2021
Ämnen:
Article
Länkar:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8538986/
https://www.ncbi.nlm.nih.gov/pubmed/34683306
http://dx.doi.org/10.3390/mi12101255

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8538986/
https://www.ncbi.nlm.nih.gov/pubmed/34683306
http://dx.doi.org/10.3390/mi12101255

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