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Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators

Film bulk acoustic resonator (FBAR)-based filters have attracted great attention because they can be used to build high-performance RF filters with low cost and small device size. Generally, FBARs employ the air cavity and Bragg mirror to confine the acoustic energy within the piezoelectric layer, s...

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Detalles Bibliográficos
Autores principales:	Shi, Linhao, Xuan, Weipeng, Zhang, Biao, Dong, Shurong, Jin, Hao, Luo, Jikui
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539591/ https://www.ncbi.nlm.nih.gov/pubmed/34684988 http://dx.doi.org/10.3390/nano11102547

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