Cargando…
Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures
Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are fil...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540083/ https://www.ncbi.nlm.nih.gov/pubmed/34683227 http://dx.doi.org/10.3390/mi12101176 |
_version_ | 1784588901917130752 |
---|---|
author | Kostmann, Cris Lisec, Thomas Bodduluri, Mani Teja Andersen, Olaf |
author_facet | Kostmann, Cris Lisec, Thomas Bodduluri, Mani Teja Andersen, Olaf |
author_sort | Kostmann, Cris |
collection | PubMed |
description | Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are filled into the molds. To meet the smallest dimensions and highest filling factors, the utilization of dry powder as the raw material is more beneficial. However, an appropriate automated technique for filling a micro mold pattern with dry micron-sized particles is missing up to now. This paper presents a corresponding approach based on the superimposition of high- and low-frequency oscillations for particle mobilization. Rubber balls are utilized to achieve dense packing. For verification, micromagnets are created from 5 µm NdFeB powder on 8” Si substrates, using the novel automated mold filling technique, as well as an existing manual one. Subsequent atomic layer deposition is utilized to agglomerate the loose NdFeB particles into rigid microstructures. The magnetic properties and inner structure of the NdFeB micromagnets are investigated. It is shown that the novel automated technique outperforms the manual one in major terms. |
format | Online Article Text |
id | pubmed-8540083 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-85400832021-10-24 Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures Kostmann, Cris Lisec, Thomas Bodduluri, Mani Teja Andersen, Olaf Micromachines (Basel) Article Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are filled into the molds. To meet the smallest dimensions and highest filling factors, the utilization of dry powder as the raw material is more beneficial. However, an appropriate automated technique for filling a micro mold pattern with dry micron-sized particles is missing up to now. This paper presents a corresponding approach based on the superimposition of high- and low-frequency oscillations for particle mobilization. Rubber balls are utilized to achieve dense packing. For verification, micromagnets are created from 5 µm NdFeB powder on 8” Si substrates, using the novel automated mold filling technique, as well as an existing manual one. Subsequent atomic layer deposition is utilized to agglomerate the loose NdFeB particles into rigid microstructures. The magnetic properties and inner structure of the NdFeB micromagnets are investigated. It is shown that the novel automated technique outperforms the manual one in major terms. MDPI 2021-09-29 /pmc/articles/PMC8540083/ /pubmed/34683227 http://dx.doi.org/10.3390/mi12101176 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Kostmann, Cris Lisec, Thomas Bodduluri, Mani Teja Andersen, Olaf Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title | Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title_full | Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title_fullStr | Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title_full_unstemmed | Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title_short | Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures |
title_sort | automated filling of dry micron-sized particles into micro mold pattern within planar substrates for the fabrication of powder-based 3d microstructures |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540083/ https://www.ncbi.nlm.nih.gov/pubmed/34683227 http://dx.doi.org/10.3390/mi12101176 |
work_keys_str_mv | AT kostmanncris automatedfillingofdrymicronsizedparticlesintomicromoldpatternwithinplanarsubstratesforthefabricationofpowderbased3dmicrostructures AT lisecthomas automatedfillingofdrymicronsizedparticlesintomicromoldpatternwithinplanarsubstratesforthefabricationofpowderbased3dmicrostructures AT boddulurimaniteja automatedfillingofdrymicronsizedparticlesintomicromoldpatternwithinplanarsubstratesforthefabricationofpowderbased3dmicrostructures AT andersenolaf automatedfillingofdrymicronsizedparticlesintomicromoldpatternwithinplanarsubstratesforthefabricationofpowderbased3dmicrostructures |