Cargando…
Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation
In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540441/ https://www.ncbi.nlm.nih.gov/pubmed/34683287 http://dx.doi.org/10.3390/mi12101237 |