MEMS-Based Integrated Triaxial Electrochemical Seismometer

This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is characterized by small volume and high symmetry. The num...

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Detalles Bibliográficos
Autores principales: Qi, Wenjie, Liu, Bowen, Liang, Tian, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540761/
https://www.ncbi.nlm.nih.gov/pubmed/34683207
http://dx.doi.org/10.3390/mi12101156

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540761/
https://www.ncbi.nlm.nih.gov/pubmed/34683207
http://dx.doi.org/10.3390/mi12101156

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