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MEMS-Based Integrated Triaxial Electrochemical Seismometer

This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is characterized by small volume and high symmetry. The num...

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Detalles Bibliográficos
Autores principales:	Qi, Wenjie, Liu, Bowen, Liang, Tian, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540761/ https://www.ncbi.nlm.nih.gov/pubmed/34683207 http://dx.doi.org/10.3390/mi12101156

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