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Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC) microstructure is presented and investigated by the finite element method (FEM). It has the advantages of low weight, small volume, and low cross-coupling. Compared with silicon(111) accelerometers with the same str...

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Detalles Bibliográficos
Autores principales:	Tian, Xiang, Sheng, Wei, Guo, Zhanshe, Xing, Weiwei, Tang, Runze
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8541214/ https://www.ncbi.nlm.nih.gov/pubmed/34683813 http://dx.doi.org/10.3390/ma14206222

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