Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP

In this report, the galvanic corrosion inhibition between Cu and Ru metal films is studied, based on bonding orbital theory, using pyridinecarboxylic acid groups which show different affinities depending on the electron configuration of each metal resulting from a π-backbonding. The sp(2) carbon ato...

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Detalles Bibliográficos
Autores principales: Lee, Kangchun, Sun, Seho, Lee, Ganggyu, Yoon, Gyeonghui, Kim, Donghyeok, Hwang, Junha, Jeong, Hojin, Song, Taeseup, Paik, Ungyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8551296/
https://www.ncbi.nlm.nih.gov/pubmed/34707193
http://dx.doi.org/10.1038/s41598-021-00689-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8551296/
https://www.ncbi.nlm.nih.gov/pubmed/34707193
http://dx.doi.org/10.1038/s41598-021-00689-6

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