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Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP
In this report, the galvanic corrosion inhibition between Cu and Ru metal films is studied, based on bonding orbital theory, using pyridinecarboxylic acid groups which show different affinities depending on the electron configuration of each metal resulting from a π-backbonding. The sp(2) carbon ato...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8551296/ https://www.ncbi.nlm.nih.gov/pubmed/34707193 http://dx.doi.org/10.1038/s41598-021-00689-6 |