Cargando…
Highly sensitive low field Lorentz-force MEMS magnetometer
We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based on measuri...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8569161/ https://www.ncbi.nlm.nih.gov/pubmed/34737368 http://dx.doi.org/10.1038/s41598-021-01171-z |