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Analysis, Synthesis and Characterization of Thin Films of a-Si:H (n-type and p-type) Deposited by PECVD for Solar Cell Applications

In this paper, the analysis, synthesis and characterization of thin films of a-Si:H deposited by PECVD were carried out. Three types of films were deposited: In the first series (00 process), an intrinsic a-Si:H film was doped. In the second series (A1–A5 process), n-type samples were doped, and to...

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Detalles Bibliográficos
Autores principales:	Garcia-Barrientos, Abel, Bernal-Ponce, Jose Luis, Plaza-Castillo, Jairo, Cuevas-Salgado, Alberto, Medina-Flores, Ariosto, Garcia-Monterrosas, María Silvia, Torres-Jacome, Alfonso
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8585228/ https://www.ncbi.nlm.nih.gov/pubmed/34771875 http://dx.doi.org/10.3390/ma14216349

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