Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices

In this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device’s relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were performed to...

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Detalles Bibliográficos
Autores principales: Zhang, Qiaozhen, Chen, Mingzhu, Liu, Huiling, Zhao, Xiangyong, Qin, Xiaomei, Wang, Feifei, Tang, Yanxue, Yeoh, Keat Hoe, Chew, Khian-Hooi, Sun, Xiaojuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8585448/
https://www.ncbi.nlm.nih.gov/pubmed/34771961
http://dx.doi.org/10.3390/ma14216437

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