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Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology

A three-axis micro magnetic sensor (MS) is developed based on the standard 180 nm complementary metal oxide semiconductor (CMOS) technology. The MS designs two magnetic sensing elements (MSEs), which consists of an x/y-MSE and an z-MSE, to reduce cross-sensitivity. The x/y-MSE is constructed by an x...

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Detalles Bibliográficos
Autores principales:	Wu, Chi-Han, Shih, Po-Jen, Tsai, Yao-Chuan, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587165/ https://www.ncbi.nlm.nih.gov/pubmed/34770260 http://dx.doi.org/10.3390/s21216953

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