A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of t...

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Detalles Bibliográficos
Autores principales: Saghir, Shayaan, Saleem, Muhammad Mubasher, Hamza, Amir, Riaz, Kashif, Iqbal, Sohail, Shakoor, Rana Iqtidar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587333/
https://www.ncbi.nlm.nih.gov/pubmed/34770547
http://dx.doi.org/10.3390/s21217242

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