A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric s...

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Detalles Bibliográficos
Autores principales: Xiong, Xin, Shimizu, Yuki, Matsukuma, Hiraku, Gao, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587772/
https://www.ncbi.nlm.nih.gov/pubmed/34770718
http://dx.doi.org/10.3390/s21217412

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587772/
https://www.ncbi.nlm.nih.gov/pubmed/34770718
http://dx.doi.org/10.3390/s21217412

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