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Next generation secondary electron detector with energy analysis capability for SEM

We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a comp...

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Detalles Bibliográficos
Autores principales:	SURI, A., PRATT, A., TEAR, S., WALKER, C., EL‐GOMATI, M.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	John Wiley and Sons Inc. 2020
Materias:	Themed Issue Papers
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8597398/ https://www.ncbi.nlm.nih.gov/pubmed/31985065 http://dx.doi.org/10.1111/jmi.12867

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