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Direct growth of wafer-scale highly oriented graphene on sapphire

Direct chemical vapor deposition (CVD) growth of wafer-scale high-quality graphene on dielectrics is of paramount importance for versatile applications. Nevertheless, the synthesized graphene is typically a polycrystalline film with high density of uncontrolled defects, resulting in a low carrier mo...

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Autores principales: Chen, Zhaolong, Xie, Chunyu, Wang, Wendong, Zhao, Jinpei, Liu, Bingyao, Shan, Jingyuan, Wang, Xueyan, Hong, Min, Lin, Li, Huang, Li, Lin, Xiao, Yang, Shenyuan, Gao, Xuan, Zhang, Yanfeng, Gao, Peng, Novoselov, Kostya S., Sun, Jingyu, Liu, Zhongfan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8604399/
https://www.ncbi.nlm.nih.gov/pubmed/34797705
http://dx.doi.org/10.1126/sciadv.abk0115
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author Chen, Zhaolong
Xie, Chunyu
Wang, Wendong
Zhao, Jinpei
Liu, Bingyao
Shan, Jingyuan
Wang, Xueyan
Hong, Min
Lin, Li
Huang, Li
Lin, Xiao
Yang, Shenyuan
Gao, Xuan
Zhang, Yanfeng
Gao, Peng
Novoselov, Kostya S.
Sun, Jingyu
Liu, Zhongfan
author_facet Chen, Zhaolong
Xie, Chunyu
Wang, Wendong
Zhao, Jinpei
Liu, Bingyao
Shan, Jingyuan
Wang, Xueyan
Hong, Min
Lin, Li
Huang, Li
Lin, Xiao
Yang, Shenyuan
Gao, Xuan
Zhang, Yanfeng
Gao, Peng
Novoselov, Kostya S.
Sun, Jingyu
Liu, Zhongfan
author_sort Chen, Zhaolong
collection PubMed
description Direct chemical vapor deposition (CVD) growth of wafer-scale high-quality graphene on dielectrics is of paramount importance for versatile applications. Nevertheless, the synthesized graphene is typically a polycrystalline film with high density of uncontrolled defects, resulting in a low carrier mobility and high sheet resistance. Here, we report the direct growth of highly oriented monolayer graphene films on sapphire wafers. Our growth strategy is achieved by designing an electromagnetic induction heating CVD operated at elevated temperature, where the high pyrolysis and migration barriers of carbon species are easily overcome. Meanwhile, the embryonic graphene domains are guided into good alignment by minimizing its configuration energy. The thus obtained graphene film accordingly manifests a markedly improved carrier mobility (~14,700 square centimeters per volt per second at 4 kelvin) and reduced sheet resistance (~587 ohms per square), which compare favorably with those from catalytic growth on polycrystalline metal foils and epitaxial growth on silicon carbide.
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spelling pubmed-86043992021-12-01 Direct growth of wafer-scale highly oriented graphene on sapphire Chen, Zhaolong Xie, Chunyu Wang, Wendong Zhao, Jinpei Liu, Bingyao Shan, Jingyuan Wang, Xueyan Hong, Min Lin, Li Huang, Li Lin, Xiao Yang, Shenyuan Gao, Xuan Zhang, Yanfeng Gao, Peng Novoselov, Kostya S. Sun, Jingyu Liu, Zhongfan Sci Adv Physical and Materials Sciences Direct chemical vapor deposition (CVD) growth of wafer-scale high-quality graphene on dielectrics is of paramount importance for versatile applications. Nevertheless, the synthesized graphene is typically a polycrystalline film with high density of uncontrolled defects, resulting in a low carrier mobility and high sheet resistance. Here, we report the direct growth of highly oriented monolayer graphene films on sapphire wafers. Our growth strategy is achieved by designing an electromagnetic induction heating CVD operated at elevated temperature, where the high pyrolysis and migration barriers of carbon species are easily overcome. Meanwhile, the embryonic graphene domains are guided into good alignment by minimizing its configuration energy. The thus obtained graphene film accordingly manifests a markedly improved carrier mobility (~14,700 square centimeters per volt per second at 4 kelvin) and reduced sheet resistance (~587 ohms per square), which compare favorably with those from catalytic growth on polycrystalline metal foils and epitaxial growth on silicon carbide. American Association for the Advancement of Science 2021-11-19 /pmc/articles/PMC8604399/ /pubmed/34797705 http://dx.doi.org/10.1126/sciadv.abk0115 Text en Copyright © 2021 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC). https://creativecommons.org/licenses/by-nc/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution-NonCommercial license (https://creativecommons.org/licenses/by-nc/4.0/) , which permits use, distribution, and reproduction in any medium, so long as the resultant use is not for commercial advantage and provided the original work is properly cited.
spellingShingle Physical and Materials Sciences
Chen, Zhaolong
Xie, Chunyu
Wang, Wendong
Zhao, Jinpei
Liu, Bingyao
Shan, Jingyuan
Wang, Xueyan
Hong, Min
Lin, Li
Huang, Li
Lin, Xiao
Yang, Shenyuan
Gao, Xuan
Zhang, Yanfeng
Gao, Peng
Novoselov, Kostya S.
Sun, Jingyu
Liu, Zhongfan
Direct growth of wafer-scale highly oriented graphene on sapphire
title Direct growth of wafer-scale highly oriented graphene on sapphire
title_full Direct growth of wafer-scale highly oriented graphene on sapphire
title_fullStr Direct growth of wafer-scale highly oriented graphene on sapphire
title_full_unstemmed Direct growth of wafer-scale highly oriented graphene on sapphire
title_short Direct growth of wafer-scale highly oriented graphene on sapphire
title_sort direct growth of wafer-scale highly oriented graphene on sapphire
topic Physical and Materials Sciences
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8604399/
https://www.ncbi.nlm.nih.gov/pubmed/34797705
http://dx.doi.org/10.1126/sciadv.abk0115
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