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Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements....

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Detalles Bibliográficos
Autores principales:	Ding, Qi, Wang, Hongliang, Zhang, Hanqiang, Huang, Xiao, Sun, Xiaolei, Qin, Zhenjie, Ren, Rui, Zhu, Jiajun, He, Changde, Zhang, Wendong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8619492/ https://www.ncbi.nlm.nih.gov/pubmed/34832751 http://dx.doi.org/10.3390/mi12111340

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