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Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si
Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devi...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620121/ https://www.ncbi.nlm.nih.gov/pubmed/34832698 http://dx.doi.org/10.3390/mi12111286 |
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author | Zhang, Hanqiang Wang, Hongliang |
author_facet | Zhang, Hanqiang Wang, Hongliang |
author_sort | Zhang, Hanqiang |
collection | PubMed |
description | Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devices have become an important research topic in communication systems and other application fields. In this paper, a theoretical study for the realization of a layered SAW filter based on a new SiO(2)/IDT/128°YX-LiNbO(3)/diamond/silicon layered structure using the modeling software COMSOL Multiphysics is presented. The effects of lithium niobate (LiNbO(3)), an interdigital transducer (IDT), and SiO(2) thin films on the evolution of the phase velocity, electromechanical coupling coefficient (k(2)), and temperature coefficient of frequency were studied by employing a finite element method simulation. Furthermore, a longitudinal coupling resonator filter was designed. To investigate the SAW characteristics of the filter, a transient analysis was conducted to calculate the electrical potential and particle displacement under the resonance condition and to analyze the frequency response. The study concluded that this new multilayer structure can be applied to design and manufacture a variety of high-frequency and wideband SAW filters with a temperature compensation function, for operation above the GHz range. |
format | Online Article Text |
id | pubmed-8620121 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-86201212021-11-27 Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si Zhang, Hanqiang Wang, Hongliang Micromachines (Basel) Article Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devices have become an important research topic in communication systems and other application fields. In this paper, a theoretical study for the realization of a layered SAW filter based on a new SiO(2)/IDT/128°YX-LiNbO(3)/diamond/silicon layered structure using the modeling software COMSOL Multiphysics is presented. The effects of lithium niobate (LiNbO(3)), an interdigital transducer (IDT), and SiO(2) thin films on the evolution of the phase velocity, electromechanical coupling coefficient (k(2)), and temperature coefficient of frequency were studied by employing a finite element method simulation. Furthermore, a longitudinal coupling resonator filter was designed. To investigate the SAW characteristics of the filter, a transient analysis was conducted to calculate the electrical potential and particle displacement under the resonance condition and to analyze the frequency response. The study concluded that this new multilayer structure can be applied to design and manufacture a variety of high-frequency and wideband SAW filters with a temperature compensation function, for operation above the GHz range. MDPI 2021-10-21 /pmc/articles/PMC8620121/ /pubmed/34832698 http://dx.doi.org/10.3390/mi12111286 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhang, Hanqiang Wang, Hongliang Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title | Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title_full | Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title_fullStr | Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title_full_unstemmed | Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title_short | Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO(2)/IDT/LiNbO(3)/Diamond/Si |
title_sort | investigation of surface acoustic wave propagation characteristics in new multilayer structure: sio(2)/idt/linbo(3)/diamond/si |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620121/ https://www.ncbi.nlm.nih.gov/pubmed/34832698 http://dx.doi.org/10.3390/mi12111286 |
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