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A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerom...

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Autores principales: Pu, Junji, Zeng, Kai, Wu, Yulie, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620212/
https://www.ncbi.nlm.nih.gov/pubmed/34832787
http://dx.doi.org/10.3390/mi12111375
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author Pu, Junji
Zeng, Kai
Wu, Yulie
Xiao, Dingbang
author_facet Pu, Junji
Zeng, Kai
Wu, Yulie
Xiao, Dingbang
author_sort Pu, Junji
collection PubMed
description In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.
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spelling pubmed-86202122021-11-27 A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities Pu, Junji Zeng, Kai Wu, Yulie Xiao, Dingbang Micromachines (Basel) Article In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices. MDPI 2021-11-04 /pmc/articles/PMC8620212/ /pubmed/34832787 http://dx.doi.org/10.3390/mi12111375 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Pu, Junji
Zeng, Kai
Wu, Yulie
Xiao, Dingbang
A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_full A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_fullStr A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_full_unstemmed A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_short A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
title_sort miniature optical force dual-axis accelerometer based on laser diodes and small particles cavities
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620212/
https://www.ncbi.nlm.nih.gov/pubmed/34832787
http://dx.doi.org/10.3390/mi12111375
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