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Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mecha...

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Detalles Bibliográficos
Autores principales:	Froemel, Joerg, Diguet, Gildas, Muroyama, Masanori
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621941/ https://www.ncbi.nlm.nih.gov/pubmed/34833661 http://dx.doi.org/10.3390/s21227578

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