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Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators

Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency inc...

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Autores principales: Wang, Wen, Wang, Jiahui, Wang, Ruijin, Chen, Zhanfeng, Han, Fuming, Lu, Keqing, Wang, Chuanyong, Xu, Zhenlong, Ju, Bingfeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622641/
https://www.ncbi.nlm.nih.gov/pubmed/34832778
http://dx.doi.org/10.3390/mi12111366
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author Wang, Wen
Wang, Jiahui
Wang, Ruijin
Chen, Zhanfeng
Han, Fuming
Lu, Keqing
Wang, Chuanyong
Xu, Zhenlong
Ju, Bingfeng
author_facet Wang, Wen
Wang, Jiahui
Wang, Ruijin
Chen, Zhanfeng
Han, Fuming
Lu, Keqing
Wang, Chuanyong
Xu, Zhenlong
Ju, Bingfeng
author_sort Wang, Wen
collection PubMed
description Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.
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spelling pubmed-86226412021-11-27 Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators Wang, Wen Wang, Jiahui Wang, Ruijin Chen, Zhanfeng Han, Fuming Lu, Keqing Wang, Chuanyong Xu, Zhenlong Ju, Bingfeng Micromachines (Basel) Article Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system. MDPI 2021-11-05 /pmc/articles/PMC8622641/ /pubmed/34832778 http://dx.doi.org/10.3390/mi12111366 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Wen
Wang, Jiahui
Wang, Ruijin
Chen, Zhanfeng
Han, Fuming
Lu, Keqing
Wang, Chuanyong
Xu, Zhenlong
Ju, Bingfeng
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_full Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_fullStr Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_full_unstemmed Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_short Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_sort modeling and compensation of dynamic hysteresis with force-voltage coupling for piezoelectric actuators
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622641/
https://www.ncbi.nlm.nih.gov/pubmed/34832778
http://dx.doi.org/10.3390/mi12111366
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