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Reliability of MEMS in Shock Environments: 2000–2020

The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the r...

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Detalles Bibliográficos
Autores principales: Peng, Tianfang, You, Zheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8623205/
https://www.ncbi.nlm.nih.gov/pubmed/34832687
http://dx.doi.org/10.3390/mi12111275
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author Peng, Tianfang
You, Zheng
author_facet Peng, Tianfang
You, Zheng
author_sort Peng, Tianfang
collection PubMed
description The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.
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spelling pubmed-86232052021-11-27 Reliability of MEMS in Shock Environments: 2000–2020 Peng, Tianfang You, Zheng Micromachines (Basel) Review The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research. MDPI 2021-10-20 /pmc/articles/PMC8623205/ /pubmed/34832687 http://dx.doi.org/10.3390/mi12111275 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Peng, Tianfang
You, Zheng
Reliability of MEMS in Shock Environments: 2000–2020
title Reliability of MEMS in Shock Environments: 2000–2020
title_full Reliability of MEMS in Shock Environments: 2000–2020
title_fullStr Reliability of MEMS in Shock Environments: 2000–2020
title_full_unstemmed Reliability of MEMS in Shock Environments: 2000–2020
title_short Reliability of MEMS in Shock Environments: 2000–2020
title_sort reliability of mems in shock environments: 2000–2020
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8623205/
https://www.ncbi.nlm.nih.gov/pubmed/34832687
http://dx.doi.org/10.3390/mi12111275
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