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Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen...

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Detalles Bibliográficos
Autores principales:	Qiao, Qifeng, Sun, Haoyang, Liu, Xinmiao, Dong, Bowei, Xia, Ji, Lee, Chengkuo, Zhou, Guangya
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8623870/ https://www.ncbi.nlm.nih.gov/pubmed/34832723 http://dx.doi.org/10.3390/mi12111311

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