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Multi-Foci Division of Nonlinear Energy Absorption on Ultrashort Pulse Laser Singulation of Sapphire Wafers

The multi-foci division of through thickness nonlinear pulse energy absorption on ultrashort pulse laser singulation of single side polished sapphire wafers has been investigated. Firstly, it disclosed the enhancement of energy absorption by the total internal reflection of the laser beam exiting fr...

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Detalles Bibliográficos
Autores principales:	Lye, Celescia Siew Mun, Wang, Zhongke, Lam, Yee Cheong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8624491/ https://www.ncbi.nlm.nih.gov/pubmed/34832740 http://dx.doi.org/10.3390/mi12111328

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