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Low-Energy Pulsed Ion Beam Technology with Ultra-High Material Removal Resolution and Widely Adjustable Removal Efficiency

High-precision optical component manufacturing by ion beam machining tools with ultra-high material removal resolution and dynamically adjustable removal efficiency is important in various industries. In this paper, we propose a low-energy pulsed ion beam (LPIB) technology that can obtain a single p...

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Detalles Bibliográficos
Autores principales:	Zhou, Guangqi, Tian, Ye, Shi, Feng, Song, Ci, Tie, Guipeng, Zhou, Gang, Xie, Lingbo, Shao, Jianda, Wu, Zhouling
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8624715/ https://www.ncbi.nlm.nih.gov/pubmed/34832782 http://dx.doi.org/10.3390/mi12111370

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