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A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network

MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis. The traditional finite element analysis method faces the disadvantages of large calculatio...

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Detalles Bibliográficos
Autores principales:	Li, Qingsong, Lu, Kuo, Wu, Kai, Zhang, Hao, Sun, Xiaopeng, Wu, Xuezhong, Xiao, Dingbang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8625225/ https://www.ncbi.nlm.nih.gov/pubmed/34832725 http://dx.doi.org/10.3390/mi12111313

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