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Visualizing nanometric structures with sub-millimeter waves
The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz–0.8 THz) by eva...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8651651/ https://www.ncbi.nlm.nih.gov/pubmed/34876583 http://dx.doi.org/10.1038/s41467-021-27264-x |