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A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
A new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8658132/ https://www.ncbi.nlm.nih.gov/pubmed/34885368 http://dx.doi.org/10.3390/ma14237212 |