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A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids
The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTC...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8658528/ https://www.ncbi.nlm.nih.gov/pubmed/34885560 http://dx.doi.org/10.3390/ma14237396 |
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author | Makarovič, Kostja Belavič, Darko Vidmar, Matjaž Malič, Barbara |
author_facet | Makarovič, Kostja Belavič, Darko Vidmar, Matjaž Malič, Barbara |
author_sort | Makarovič, Kostja |
collection | PubMed |
description | The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 μm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium. |
format | Online Article Text |
id | pubmed-8658528 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-86585282021-12-10 A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids Makarovič, Kostja Belavič, Darko Vidmar, Matjaž Malič, Barbara Materials (Basel) Article The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 μm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium. MDPI 2021-12-02 /pmc/articles/PMC8658528/ /pubmed/34885560 http://dx.doi.org/10.3390/ma14237396 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Makarovič, Kostja Belavič, Darko Vidmar, Matjaž Malič, Barbara A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title | A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title_full | A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title_fullStr | A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title_full_unstemmed | A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title_short | A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
title_sort | 3d ltcc-based ceramic microfluidic system with rf dielectric heating of liquids |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8658528/ https://www.ncbi.nlm.nih.gov/pubmed/34885560 http://dx.doi.org/10.3390/ma14237396 |
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