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Bias-Enhanced Formation of Metastable and Multiphase Boron Nitride Coating in Microwave Plasma Chemical Vapor Deposition

Boron nitride (BN) is primarily a synthetically produced advanced ceramic material. It is isoelectronic to carbon and, like carbon, can exist as several polymorphic modifications. Microwave plasma chemical vapor deposition (MPCVD) of metastable wurtzite boron nitride is reported for the first time a...

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Detalles Bibliográficos
Autores principales:	Chakrabarty, Kallol, Baker, Paul A., Vijayan, Vineeth M., Catledge, Shane A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8658670/ https://www.ncbi.nlm.nih.gov/pubmed/34885322 http://dx.doi.org/10.3390/ma14237167

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