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Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System

In this study, aluminum gallium nitride (AlGaN) thin films are used as the piezoelectric layers to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices. AlGaN film is deposited on a Bragg reflector, composed of three pairs of Mo and SiO(2) films, through a reactive rad...

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Detalles Bibliográficos
Autores principales: Chang, Yu-Chen, Chen, Ying-Chung, Cheng, Chien-Chuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8658800/
https://www.ncbi.nlm.nih.gov/pubmed/34885532
http://dx.doi.org/10.3390/ma14237377