Characterization and Benchmark of a Novel Capacitive and Fluidic Inclination Sensor

In this paper, a fluidic capacitive inclination sensor is presented and compared to three types of silicon-based microelectromechanical system (MEMS) accelerometers. MEMS accelerometers are commonly used for tilt measurement. They can only be manufactured by large companies with clean-room technolog...

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Detalles Bibliográficos
Autores principales: Schwenck, Adrian, Guenther, Thomas, Zimmermann, André
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8659599/
https://www.ncbi.nlm.nih.gov/pubmed/34884034
http://dx.doi.org/10.3390/s21238030

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8659599/
https://www.ncbi.nlm.nih.gov/pubmed/34884034
http://dx.doi.org/10.3390/s21238030

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