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Characterization and Benchmark of a Novel Capacitive and Fluidic Inclination Sensor
In this paper, a fluidic capacitive inclination sensor is presented and compared to three types of silicon-based microelectromechanical system (MEMS) accelerometers. MEMS accelerometers are commonly used for tilt measurement. They can only be manufactured by large companies with clean-room technolog...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8659599/ https://www.ncbi.nlm.nih.gov/pubmed/34884034 http://dx.doi.org/10.3390/s21238030 |