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Integrated wafer-scale manufacturing of electron cryomicroscopy specimen supports
We present a process for the manufacture of electron cryomicroscopy (cryoEM) specimen supports with an integrated foil–grid structure, using cryogenic vacuum evaporation (cryoEvap) and patterned electroplating on a silicon wafer substrate. The process is designed to produce a pattern of nanometre sc...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8689146/ https://www.ncbi.nlm.nih.gov/pubmed/34740028 http://dx.doi.org/10.1016/j.ultramic.2021.113396 |