Thin-Film-Based SAW Magnetic Field Sensors

In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be...

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Detalles Bibliográficos
Autores principales: Meyer, Jana Marie, Schell, Viktor, Su, Jingxiang, Fichtner, Simon, Yarar, Erdem, Niekiel, Florian, Giese, Thorsten, Kittmann, Anne, Thormählen, Lars, Lebedev, Vadim, Moench, Stefan, Žukauskaitė, Agnė, Quandt, Eckhard, Lofink, Fabian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703322/
https://www.ncbi.nlm.nih.gov/pubmed/34960260
http://dx.doi.org/10.3390/s21248166
Descripción
Sumario:In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO(2) layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/ [Formula: see text] at 10 Hz and 72 pT/ [Formula: see text] at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about [Formula: see text] 1.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented.

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