Construction and Characterization of TiN/Si(3)N(4) Composite Insulation Layer in TiN/Si(3)N(4)/Ni(80)Cr(20) Thin Film Cutting Force Sensor

The measurement of cutting force is an effective method for machining condition monitoring in intelligent manufacturing. Titanium nitride films and silicon nitride films were prepared on 304 stainless steel substrates by DC-reactive magnetron sputtering and plasma-enhanced chemical vapor deposition...

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Detalles Bibliográficos
Autores principales: Ma, Ruyuan, Wu, Wenge, He, Zhenyu, Cheng, Yunping, Liu, Lijuan, Zhao, Yongjuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703434/
https://www.ncbi.nlm.nih.gov/pubmed/34945326
http://dx.doi.org/10.3390/mi12121476

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703434/
https://www.ncbi.nlm.nih.gov/pubmed/34945326
http://dx.doi.org/10.3390/mi12121476

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