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Construction and Characterization of TiN/Si(3)N(4) Composite Insulation Layer in TiN/Si(3)N(4)/Ni(80)Cr(20) Thin Film Cutting Force Sensor
The measurement of cutting force is an effective method for machining condition monitoring in intelligent manufacturing. Titanium nitride films and silicon nitride films were prepared on 304 stainless steel substrates by DC-reactive magnetron sputtering and plasma-enhanced chemical vapor deposition...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703434/ https://www.ncbi.nlm.nih.gov/pubmed/34945326 http://dx.doi.org/10.3390/mi12121476 |