Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

This study investigated the effects of structural dimension variation arising from fabrication imperfections or active structural design on the vibration characteristics of a (100) single crystal silicon (SCS) ring-based Coriolis vibratory gyroscope. A mathematical model considering the geometrical...

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Detalles Bibliográficos
Autores principales: Ma, Zhipeng, Chen, Xiaoli, Jin, Xiaojun, Jin, Yiming, Zheng, Xudong, Jin, Zhonghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703920/
https://www.ncbi.nlm.nih.gov/pubmed/34945333
http://dx.doi.org/10.3390/mi12121483

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8703920/
https://www.ncbi.nlm.nih.gov/pubmed/34945333
http://dx.doi.org/10.3390/mi12121483

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