The Design of a Reflection Electron Energy Loss Spectrometer Attachment for Low Voltage Scanning Electron Microscopy

This paper presents the design of a reflection electron energy spectrometer (REELS) attachment for low voltage scanning electron microscopy (LVSEM) applications. The design is made by carrying out a scattered electron trajectory ray paths simulation. The spectrometer attachment is small enough to fi...

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Detalles Bibliográficos
Autores principales: Chuah, Jonathan, Khursheed, Anjam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706004/
https://www.ncbi.nlm.nih.gov/pubmed/34947108
http://dx.doi.org/10.3390/ma14247511

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706004/
https://www.ncbi.nlm.nih.gov/pubmed/34947108
http://dx.doi.org/10.3390/ma14247511

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