A Miniature Fabry–Pérot Fiber Interference Sensor Based on Polyvinyl Chloride Membrane for Acoustic Pressure Sensing in Mid–High-Frequency Band

In this paper, a Fabry–Pérot interference fiber sensor was fabricated by using a Polyvinyl chloride membrane (20 μm in thickness) attached at the end of a ferrule with an inner diameter of 1.1 mm. In consideration of the vibration response of the membrane, the feature of the first-order natural frequency of membrane was analyzed by COMSOL Multiphysics. The acoustic sensing performance of the Fabry–Pérot fiber interference sensor was studied in air. The results reveal that the sensor possessed good acoustic pressure sensitivity, in the order of 33.26 mV/Pa. In addition, the noise-limited minimum detectable pressure level was determined to be 58.9 μPa/Hz(1/2) and the pressure-induced deflection obtained was 105 nm/Pa at the frequency of 1 kHz. The response of the sensor was approximately consistent with the reference sensor from 1 to 7 kHz. All these results support that the fabricated Fabry–Pérot fiber interference sensor may be applied for ultra-sensitive pressure sensing applications.