A Selective Etching Route for Large-Scale Fabrication of β-Ga(2)O(3) Micro-/Nanotube Arrays

In this paper, based on the different etching characteristics between GaN and Ga(2)O(3), large-scale and vertically aligned β-Ga(2)O(3) nanotube (NT) and microtube (MT) arrays were fabricated on the GaN template by a facile and feasible selective etching method. GaN micro-/nanowire arrays were prepa...

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Detalles Bibliográficos
Autores principales: Ding, Shan, Zhang, Liying, Li, Yuewen, Xiu, Xiangqian, Xie, Zili, Tao, Tao, Liu, Bin, Chen, Peng, Zhang, Rong, Zheng, Youdou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707424/
https://www.ncbi.nlm.nih.gov/pubmed/34947676
http://dx.doi.org/10.3390/nano11123327

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