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Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors
For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled duri...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707469/ https://www.ncbi.nlm.nih.gov/pubmed/34960478 http://dx.doi.org/10.3390/s21248386 |