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Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors

For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled duri...

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Detalles Bibliográficos
Autores principales:	Thormählen, Lars, Seidler, Dennis, Schell, Viktor, Munnik, Frans, McCord, Jeffrey, Meyners, Dirk
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707469/ https://www.ncbi.nlm.nih.gov/pubmed/34960478 http://dx.doi.org/10.3390/s21248386

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